Gas Purifier FSM1/2 Model E3000CA For N2
物料號 94040051
Gas Purifier FSM1/2 Model E3000CA For N2
物料號 94040051
可以迅速提供(gong)給已注册用戶
MicroTorr purifiers are the most complete and reliable solution for point-of-use (POU) gas purification. These purifiers give an uncompromising consistency in the quality of your process, provide a low pressure drop and guarantee a long life.
Applicaties
- Weld gas/purge gas
- Pharmaceutical production
- Semiconductor process equipment
- Analytical equipment
- Annealing cover gas
- LED manufacturing
- Flat panel display production
- Solar and energy
- Other emerging technologies
Downloads
Point of use purifiers datasheet2022年9月9日, 09:57 / 508.31 kB
Point of use purifiers brochure2022年9月9日, 09:57 / 1.43 MB
Applicaties
- Weld gas/purge gas
- Pharmaceutical production
- Semiconductor process equipment
- Analytical equipment
- Annealing cover gas
- LED manufacturing
- Flat panel display production
- Solar and energy
- Other emerging technologies
Downloads
Point of use purifiers datasheet2022年9月9日, 09:57 / 508.31 kB
Point of use purifiers brochure2022年9月9日, 09:57 / 1.43 MB
Article
94040051
Header [Brand]
Purifier UHP
Description
Gas Purifier FSM1/2 Model E3000CA For N2
Vessel construction (material)
SS 316L
Gas(es) purified
N2
Impurities removed
H2O, O2, CO, CO2, H2 to < 100 ppt; Volatile Acids, Organics, Refractory Compounds to < 1ppt; Volatile Bases < 5 ppt, Metals < 1ppbV
Regenerable
Yes
Max. operating pressure
69 bar
Leak rating
< 2 x 10-9 atm cc/sec
Maximum Flow
500 SLPM
Average Flow
40 SLPM (1 year regen int.)
Fittings
Face seal male 1/2
0,003um particle filtration:
yes
Operating temperature
-20 to 65 °C
增值税常規税率
21%
C
76,2 mm
A
447 mm
WE ENGINEER FROM SOURCE TO PROCESS
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