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Purifier UHP FSM1/4 SS316L Hydrides Max. Inlet 250PSIG Max. Flow 4,5 SLPM

物料號 31395460

Purifier UHP FSM1/4 SS316L Hydrides Max. Inlet 250PSIG Max. Flow 4,5 SLPM

物料號 31395460

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描述

MicroTorr purifiers are the most complete and reliable solution for point-of-use (POU) gas purification. These purifiers give an uncompromising consistency in the quality of your process, provide a low pressure drop and guarantee a long life.

一般信息

Applicaties

Weld gas/purge gas

Pharmaceutical production

Semiconductor process equipment

Analytical equipment

Annealing cover gas

LED manufacturing

Flat panel display production

Solar and energy

Other emerging technologies

Downloads

Point of use purifiers datasheet2022年9月9日, 09:57 / 508.31 kB

Point of use purifiers brochure2022年9月9日, 09:57 / 1.43 MB

Applicaties

Weld gas/purge gas

Pharmaceutical production

Semiconductor process equipment

Analytical equipment

Annealing cover gas

LED manufacturing

Flat panel display production

Solar and energy

Other emerging technologies

Downloads

Point of use purifiers datasheet2022年9月9日, 09:57 / 508.31 kB

Point of use purifiers brochure2022年9月9日, 09:57 / 1.43 MB

技術規格

Article

31395460

Header [Brand]

Purifier UHP

Description

Purifier UHP FSM1/4 SS316L Hydrides Max. Inlet 250PSIG Max. Flow 4,5 SLPM

Packaging specification

Cleaned and double-packed

Manufacturer

Mott

Manufacturer code

050Y-V04-HYDR-CR-TA

Vessel construction (material)

SS 316L

Gas(es) purified

AsH₃
B₂H₆
CH₄
D.C.S.(SiH₂Cl₂)
Ge₂H₆
GeH₄
H₂Se
NH₃
PH₃
SF₆
SiH₄
Si₂H₆
DMHZ
Hydride/Carrier gas mix

Impurities removed

CO₂
H₂O
O₂

Particle filtration

0,0015 μm

Inlet particle filtration

1 µm

Outlet purity

< 100 PPT

Regenerable

Yes

Maximum Pressure Drop

<2 psid

Max. operating pressure

17,24 Bar

Leak rating

10^-9 mbar · l/s

Max. temperature

Max. 50 °C

Maximum Flow

4,5 SLPM

Average Flow

0,3 SLPM

Polishing

Electropolishing

Surface finish

<10 µm Ra

增值税常規税率

21%

尺寸

Face Seal male 1/4

Ø D

25,4 mm

84,0 mm

備注

Remarks

Optional: 0.003 µm filtration
inlet/outlet fittings and valves
Sub-micron particle filtration
Face-to-face matching

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Purifier UHP FSM1/4 SS316L Hydrides Max. Inlet 250PSIG Max. Flow 4,5 SLPM

物料號 31395460

Purifier UHP FSM1/4 SS316L Hydrides Max. Inlet 250PSIG Max. Flow 4,5 SLPM

物料號 31395460